When 3:30 PM - 5:00 PM Sep 12, 2008
Where GM Room, Lurie Engineering Center
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Materials Science of Silicon MEMS: A Two-Way Street


Arthur H. Heuer, Case Western Reserve University (Van Vlack Lecture)

MEMS — Micro Electro Mechanical Systems - add sensing and actuation, to the electronic functionality that is the hallmark of the semiconductor revolution. A majority of current commercial devices employ Si as the structural material to take advantage of the extensive Si technology developed for consumer and military devices.

While the complexity of current Si-based MEMS devices can be breathtaking, and the ability of semiconductor engineers to fabricate these with high yield and modest cost is impressive, material scientists have important contributions to make in understanding and optimizing various of the processes used in Si MEMS fabrication. This will be demonstrated with regard to minimizing residual stress in as-fabricated polysilicon devices.

Conversely, MEMS technology can be used to study material behavior at the microscale, and to study phenomena in a manner not possible in the bulk. This will be demonstrated with regard to cyclic fatigue of polysilicon.

The Van Vlack Lecture Series was established in honor of L. H. Van Vlack, to provide a distinguished lecture series from the outstanding leaders in the field of Materials Science and Engineering