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PRODID:-//AT Content Types//AT Event//EN
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METHOD:PUBLISH
BEGIN:VEVENT
DTSTAMP:20260609T185014Z
CREATED:20080808T184254Z
UID:ATEvent-aba34c73-6af3-40f9-b24a-ceeb718f3abc
LAST-MODIFIED:20080808T184650Z
SUMMARY:Materials Science of Silicon MEMS: A Two-Way Street
DTSTART:20080912T193000Z
DTEND:20080912T210000Z
DESCRIPTION:Arthur H. Heuer\, Case Western Reserve University (Van Vla
 ck Lecture)
LOCATION:GM Room\, Lurie Engineering Center
CATEGORIES:Seminar
CLASS:PUBLIC
END:VEVENT
END:VCALENDAR