Hydrogen-implantation induced silicon surface layer exfoliation

Amit Misra

Professor and Department Chair

amitmis@umich.edu

3062B H.H. Dow

T: (734) 763-2445

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T. Höchbauer, A. Misra, R. Verda, M. Nastasi, J.W. Mayer, Y. Zheng, and S.S. Lau (2000)

Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties, 80(11):1921-1931.

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