The influence of ion-implantation damage on hydrogen-induced ion-cut

Amit Misra

Professor and Department Chair

amitmis@umich.edu

3062B H.H. Dow

T: (734) 763-2445

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T. Höchbauer, A. Misra, R. Verda, Y. Zheng, S.S. Lau, J.W. Mayer, and M. Nastasi (2001)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 175-177:169-175.

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