Investigation of the cut location in hydrogen implantation induced silicon surface layer exfoliation

Amit Misra

Professor and Department Chair

amitmis@umich.edu

3062B H.H. Dow

T: (734) 763-2445

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T. Höchbauer, A. Misra, M. Nastasi, and J.W. Mayer (2001)

Journal of Applied Physics, 89(11 I):5980-5990.

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