The use of ion channeling and elastic recoil detection in determining the mechanism of cleavage in the ion-cut process

Amit Misra

Professor and Department Chair

amitmis@umich.edu

3062B H.H. Dow

T: (734) 763-2445

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T. Höchbauer, M. Nastasi, R.D. Verda, A. Misra, K. Henttinen, I. Suni, S.S. Lau, and J.W. Mayer (2002)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 190(1-4):592-597.

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