Comparison of thermally and mechanically induced Si layer transfer in hydrogen-implanted Si wafers

Amit Misra

Professor and Department Chair

3062B H.H. Dow

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T. Höchbauer, A. Misra, M. Nastasi, K. Henttinen, T. Suni, I. Suni, S.S. Lau, and W. Ensinger (2004)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 216(1-4):257-263.

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