Formation of hydrogen complexes in proton implanted silicon and their influence on the crystal damage

Amit Misra

Professor and Department Chair

amitmis@umich.edu

3062B H.H. Dow

T: (734) 763-2445

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T. Höchbauer, A. Misra, M. Nastasi, J.W. Mayer, and W. Ensinger (2006)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 242(1-2):623-626.

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