Factors limiting the measurement of residual stresses in thin films by nanoindentation

Amit Misra

Professor and Department Chair

amitmis@umich.edu

3062B H.H. Dow

T: (734) 763-2445

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C.M. Lepienski, G.M. Pharr, Y.J. Park, T.R. Watkins, A. Misra, and X. Zhang (2004)

Thin Solid Films, 447-448:251-257.

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