Assessment of subsurface damage in polished II-VI semiconductors by ion channeling

Amit Misra

Professor and Department Chair

amitmis@umich.edu

3062B H.H. Dow

T: (734) 763-2445

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D.A. Lucca, C.J. Wetteland, A. Misra, M.J. Klopfstein, M. Nastasi, C.J. Maggiore, and J.R. Tesmer (2004)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 219-220(1-4):611-617.

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