Subsurface damage in (1 0 0) ZnSe introduced by mechanical polishing

Amit Misra

Professor and Department Chair

amitmis@umich.edu

3062B H.H. Dow

T: (734) 763-2445

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D.A. Lucca, L. Shao, C.J. Wetteland, A. Misra, M.J. Klopfstein, and M. Nastasi (2006)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 249(1-2 SPEC. ISS.):907-910.

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