Residual stresses and ion implantation effects in Cr thin films

Amit Misra

Professor and Department Chair

amitmis@umich.edu

3062B H.H. Dow

T: (734) 763-2445

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A. Misra, S. Fayeulle, H. Kung, T.E. Mitchell, and M. Nastasi (1999)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 148(1-4):211-215.

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