The role of oxygen in the intrinsic tensile residual stress evolution in sputter-deposited thin metal films

Amit Misra

Professor and Department Chair

amitmis@umich.edu

3062B H.H. Dow

T: (734) 763-2445

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A. Misra and M. Nastasi (2000)

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 18(5):2517-2521.

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