Intrinsic residual stresses in metal films synthesized by energetic particle deposition

Amit Misra

Professor and Department Chair

amitmis@umich.edu

3062B H.H. Dow

T: (734) 763-2445

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A. Misra and M. Nastasi (2001)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 175-177:688-693.

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