Using ion beam analysis in determining the mechanisms of cleavage in hydrogen ion implanted Si

Amit Misra

Professor and Department Chair

amitmis@umich.edu

3062B H.H. Dow

T: (734) 763-2445

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M. Nastasi, T. Höchbauer, R.D. Verda, A. Misra, J.-K. Lee, J.W. Mayer, and S.S. Lau (2004)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 219-220(1-4):604-610.

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