Depth profiling of hydrogen in crystalline silicon using elastic recoil detection analysis

Amit Misra

Professor and Department Chair

3062B H.H. Dow

T: (734) 763-2445



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R.D. Verda, C.J. Maggiore, J.R. Tesmer, A. Misra, T. Hoechbauer, M. Nastasi, and R.W. Bower (2001)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 183(3-4):401-412.

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