Joanna Millunchick

Focused Ion Beams for Nanomanufacturing: Anisotropic Collodoidal Nanofludic Manufacturing

Collaborators: Michael J. Solomon, Sharon Glotzer, Mark Burns; University of Michigan- Ann Arbor
Sponsor: National Science Foundation
Highly lauded for its potential in biomedical applications - which usually involve particles of tens of microns or larger - microfludic device is marching towards a new scale level. Nanoparticles, unlike microparticles, are Brownian. Their packing and interaction may result in interesting hierarchical particle assmblies, which could unveil great scientific mysteries at fundamental level and impact tremendously in semiconductor and biomedical researches. Focused Ion Beam (FIB) is considered a good complement to existing semiconductor fabrication techniques for micro- and nanofludic device manufacturing, for its short lead time and great micro-maneuverability. By integrating with semiconductor fabrication techniques, we have shown the potential of making innovative device at sub-micron level, which we will eventually try to get down to nano level. This project also includes, but is not limited to, charactization of nano-particle, fabrication process devleopment and device design.
Highlights (Click an image for more information)
  • FIB-patterned Surface

    A sub-micron channel made by conjunction of semiconductor fabrication techniques ("Fabbing") and Focused Ion Beam ("FIBbing"). The channel has a weir size of 0.5 micron and a channel size 1.5 micron, designed for assembly of 1 micron colloid.

  • Anisotropic particle synthesis by fluidic assembly of microspheres

    Fluidic device showing packing of particles in a confined channel by programmable fluid flow. The arrows show the direction of fluid flow.

  • Anisotropic building blocks fabricated

    A 11-mer fabricated from our device