Modeling, design and fabrication of a freestanding nanoporous membrane

Joanna Millunchick

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joannamm@umich.edu

2014 HH Dow

T: (734) 647-8980

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Di Deng, Denis Nothern, David Liaw, Thomas Liu, Peter Peterson, Brian Gilchrist, and Joanna Millunchick (2011)

MICROELECTRONIC ENGINEERING, 88(11):3219-3223.

Nanoporous membranes are widely researched on many application fronts.One challenge for nanoporous membrane research is to providemechanically stable designs due to inherently weak strength fromdiminished dimensions. We present a mathematical model that predicts thedeflection behavior and strength of nanoporous membranes. Based on thesemathematic predictions, we fabricated a nanoporous membrane based on ahierarchical design using microfabrication techniques. Direct forcemeasurement with an atomic force microscope shows that the modelaccurately predicts the deflection behavior of the fabricated nanoporousmembrane. (C) 2011 Elsevier B.V. All rights reserved.

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