Effect Of 20-95 Ev Ar Ion-Bombardment Of Gaas(001) - In Pursuit Of Damage-Free Ion-Assisted Growth And Etching

Joanna Millunchick

Professor

joannamm@umich.edu

2014 HH Dow

T: (734) 647-8980

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Jm Millunchick, L Hultman, and Sa Barnett (1995)

Journal Of Vacuum Science & Technology A-Vacuum Surfaces And Films, 13(3):1155.

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