Microstructures of microcrystalline silicon thin films prepared by hot-wire chemical vapor deposition

Kai Sun

Associate Research Scientist

kaisun@umich.edu

2800 Plymouth Road, NCRC Building 22 G013

T: (734) 936-3353

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M. Zhu, X. Guo, G. Chen, H. Han, M. He, and K. Sun (2000)

THIN SOLID FILMS, 360(1-2):205-212.

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