Formation of metal nanoparticles by short-distance sputter deposition in a reactive ion etching chamber

Kai Sun

Associate Research Scientist

kaisun@umich.edu

2800 Plymouth Road, NCRC Building 22 G013

T: (734) 936-3353

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M. Nie, K. Sun, and D. D Meng (2009)

JOURNAL OF APPLIED PHYSICS, 106(5):Article Number: 054314.

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