Microstructure and Residual-Stress of Very Thin Mo Films

Steven Yalisove

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smy@umich.edu

2014 Gerstacker

T: (734) 764-4346

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DP Adams, LJ Parfitt, JC Bilello, SM Yalisove, and ZU Rek (1995)

Thin Solid Films, 266(1):52.

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