The role of impurities and microstructure on residual stress in nanoscale Mo films

Steven Yalisove

Professor

smy@umich.edu

2014 Gerstacker

T: (734) 764-4346

Bio

Projects

Publications

Facilities

Group


LP Kendig, ZU Rek, SM Yalisove, and JC Bilello (2000)

Surface & Coatings Technology, 132(2-3):124.

Document Actions