Depth dependence of residual strains in polycrystalline Mo thin films using high-resolution x-ray diffraction

Steven Yalisove

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smy@umich.edu

2014 Gerstacker

T: (734) 764-4346

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SG Malhotra, ZU Rek, SM Yalisove, and JC Bilello (1996)

Journal of Applied Physics, 79(9):6872.

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