An in situ ex situ X-ray analysis system for thin sputtered films

Steven Yalisove

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smy@umich.edu

2014 Gerstacker

T: (734) 764-4346

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AK Malhotra, JF Whitacre, ZB Zhao, J Hershberger, SM Yalisove, and JC Bilello (1998)

Surface & Coatings Technology, 110(1-2):105.

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