Real-time/in situ diffraction study of phase and microstructural evolution in sputtered beta-Ta/Ta2O5 films

Steven Yalisove

Professor

smy@umich.edu

2014 Gerstacker

T: (734) 764-4346

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JF Whitacre, SM Yalisove, and JC Bilello (2001)

Journal of Vacuum Science & Technology A-Vacuum Surfaces And Films, 19(6):2910.

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