Epitaxial Orientation and Morphology of Thin CoSi2 Films Grown on Si(100) - Effects of Growth-Parameters

Steven Yalisove

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smy@umich.edu

2014 Gerstacker

T: (734) 764-4346

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SM Yalisove, Rt Tung, and D Loretto (1989)

Journal of Vacuum Science & Technology A-Vacuum Surfaces And Films, 7(3):1472.

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