Determination of residual stress in thin films: a comparative study of X-ray topography versus laser curvature method

Steven Yalisove

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smy@umich.edu

2014 Gerstacker

T: (734) 764-4346

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ZB Zhao, J Hershberger, SM Yalisove, and JC Bilello (2002)

Thin Solid Films, 415(1-2):21.

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