Phase formation and structure of magnetron sputtered chromium nitride films: in-situ and ex-situ studies

Steven Yalisove

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smy@umich.edu

2014 Gerstacker

T: (734) 764-4346

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ZB Zhao, ZU Rek, SM Yalisove, and JC Bilello (2004)

Surface & Coatings Technology, 185(1-3):329.

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