UM MSE Alumnus Qinghuang Lin Honored by SPIE

UM MSE Alumnus Qinghuang Lin Honored by SPIE

Dr Qinghuang Lin

Dr. Qinghuang Lin (MSE, Ph.D. 94’), a Research Staff Member of the IBM Thomas J. Watson Research Center in Yorktown Heights, New York, USA was honored by SPIE (The International Society for Optical and Photonics Engineering) with a promotion to the rank of a 2017 SPIE Fellow in January, 2017. This was the third Fellowship title he has received. In 2014, Dr. Lin was named a Fellow of the American Chemical Society (ACS Fellow). In 2015, he was named a Fellow of the Division of Polymeric Materials Science and Engineering (PMSE), American Chemical Society (PMSE Fellow).


Each year, SPIE promotes members as new Fellows of the Society. Fellows are Members of distinction who have made significant scientific and technical contributions in the multidisciplinary fields of optics, photonics, and imaging. They are honored for their technical achievement, for their service to the general optics community, and to SPIE in particular. More than 1,200 SPIE members have become Fellows since the Society's inception in 1955.


In 2017, SPIE honors 71 new SPIE Fellows. Dr. Lin was promoted to an SPIE Fellow “for achievements in materials and processes for lithography.” Lithography is an essential step for making smaller, faster and cheaper microchips that power everything from supercomputers, to smart phones and sophisticated medical devices. Dr. Lin received his SPIE Fellow plaque at the SPIE Advanced Lithography Symposium held on February 27, 2017 in San Jose, California, USA.


On February 27, 2017, Dr. Qinghuang Lin (center) received his SPIE Fellow plaque from Dr. Eugene Arthurs (left), CEO of SPIE and Dr. Bruce Smith (right), Professor of Rochester Institute of Technology and Chair of the 2017 SPIE Advanced Lithography Symposium.


Dr. Qinghuang Lin is a Research Staff Member and Manager at the IBM T.J. Watson Research Center. For more than twenty years, he has held a variety of research, engineering, management and technology strategy positions in the research and development of more than ten generations (0.25 um to 5 nm nodes) of CMOS logic technologies as well as dynamic random access memory (DRAM), spin-torque transfer magnetic random access memory (STT-MRAM) technologies and other exploratory research at IBM.


An IBM Master Inventor, Dr. Lin holds more than 90 issued US patents. He is a recipient of 26 IBM Invention Plateau Achievement Awards. In 2002, he, along with colleagues, received an IBM Research Division Award for "invention, development and implementation of 248 nm bilayer resist technology in manufacturing." This IBM 248 nm bilayer resist technology was part of the 40 years of innovations in semiconductor technology that won IBM the 2004 US National Medal of Technology -- the highest honor awarded by the President of the United States to America's leading innovators. In 2015, Dr. Lin, along with colleagues, received an IBM Research Division Outstanding Achievement Award for “Spin-Torque Transfer Magnetic Random Access Memory (STT-MRAM).” In 2016, he, along with colleagues, received an IBM Research Division Achievement Award for “contributions to fundamental understanding of line edge roughness in semiconductor technology.” Dr. Lin’s inventions have been adopted in the mass production of advanced microchips for high-performance computers and some of the most popular mobile devices.


A frequent organizer and speaker of professional conferences at ACS, MRS, SPIE and SEMI, Dr. Lin is the editor or co-editor of 7 books and 9 conference proceedings volumes and the author and co-author of over 70 technical papers. He is an Associate Editor of Journal of Micro/Nanolithography, MEMS, and MOEMS and served as a Guest Editor of Journal of Materials Research focus issue on self-assembly and directed assembly of advanced materials.


Dr. Qinghuang Lin received his B.E. and M.S. degrees from Tsinghua University, Beijing, China and his Ph.D. degree with Professor Albert Yee from the University of Michigan, Ann Arbor, Michigan, USA. He was a post-doctoral fellow at the University of Texas at Austin prior to joining IBM in 1995.