Anatech Hummer VI Sputter Coater w/ carbon evaporation accessory

Prepared by:

Y. Qi and J. Scanlon

Location:

Dow 2224

Hazards:

The following materials and equipment associated with this procedure present exposure or physical health hazards. Safety precautions are prudent and mandatory.

None



Controls:

Prior to performing this procedure, the following safety equipment must be accessible and ready for use: (e.g. chemical fume hood, biological safety cabinet, laminar flow hood, chemical spill kits)

None



Protective Equipment:

Prior to performing this procedure, the following personal protective equipment must be obtained and ready for use: (e.g. acid resistant gloves, safety eyewear, lab coat, chemical splash apron)

Safety glasses should be worn due to the risk of implosion. You should wear gloves while touching the Hummer VI or handling anything going into the Hummer VI. This reduces contamination problems.



Waste Disposal:

This procedure will result in the follow regulated waste which must be disposed of in compliance with environmental regulations.

None



Spill:

In the event that a hazardous material spills during this procedure, be prepared to execute the emergency procedure below.

Not Applicable


Instructions:


Contact Ying Qi or Tim Chambers for training. For booking go here. You will need an MSE user account. Please fill out the form in the attachments and bring the original copy when you come for your training. Fill out the user section and have your advisor fill out the section provided. An account shortcode and account contact will be required as well. ALL TRAINING MUST BE GIVEN BY MSE TECH STAFF.

Procedure for sputter coating:

Note: The needle valve is the black knob on the right top section of the sputter coating chamber. Before starting, make sure that the
needle valve on the Hummer is closed (turned all the way clockwise). Do NOT close this valve more than finger tight. If you turn it toohard, you will damage it! Also make sure that the valve on the Ar bottle itself is open (it should be left open all the time.) The
MANUAL/AUTO switch should be left on MANUAL.

  1. Make sure the "jumper plug" is in place. It is located on back, lefthand side.
  2. Place specimens in the chamber and then close the lid, making a seal between the lid and the glass cylinder. Samples do not need to be held down with anything.
  3. Close the lid, and turn ON the power button. The power button is located on the lower, right hand side of the front panel. You will see the pressure begin to fall.
  4. As the system is pumping down, flush the system with argon. Do this by turning the needle valve counter-clockwise until you see the pressure rise. This indicates that the valve is open. Then close the valve and let the system pump down again. Do this two to three times.
  5. When 70 mTorr or less is achieved, turn the HI- VOLTAGE switch to ON.
  6. Turn the HI- VOLTAGE control knob to 7-9. If you see Current meter pointer goes from left to right when you increase the voltage. Turn the voltage off and seek help.
  7. Increase gas pressure with the needle valve until you observe a reading of 10 mA on the CURRENT meter.
  8. The initial appearance of plasma will cause the chamber pressure to rise and fall due to molecular adhesion of water vapor, atmospheric gases and solvents. Adjust the needle valve until pressure and current stabilize.

    1. If MANUAL timing is to be used
      1. Let the coating proceed for as long as required to obtain proper coating thickness. Refer to the Thickness vs. Time graph above to determine proper timing to achieve a certain thickness. The lab uses a Gold/Palladium (Au/Pd) ring with a 60/40 ratio, this is the part of the graph highlighted in yellow.
      2. When specimen is coated, reduce HI-VOLTAGE control to ZERO. Turn HI VOLTAGE switch off.
    2. If AUTOMATIC timing is to be used:
      1. Set timer to desired coating time. Refer to the Thickness vs. Time graph above to determine proper timing. -- Switch to AUTO - plasma will terminate automatically after timer set has expired. The lab uses a Gold/Palladium (Au/Pd) ring with a 60/40 ratio, this is the part of the graph highlighted in yellow.
      2. Switch PULSE to ON position as desired. Time which is set on timer will be actual plating time during ON cycle of pulse mode
  9. Close gas needle valve.
  10. Turn MAIN POWER OFF.
  11. Wait for chamber to vent. It will do so automatically when main power is switched OFF.
  12. Please wipe clean the glass chamber with cloth after use.
  13. Typical Operating Conditions:
    1. Gold or Gold/Palladium Deposition
      1. Voltage Control Position 7-9 Pressure 40 - 80 Millitorr (Argon) Current 10 Milliamperes
  14. Maintenance
    1. If you observe that the unit is not working correctly, see Ying Qi in Room 2219A.
  15. Trouble shooting tips:
    1. The Au-Pd ring (located in the lid) must be centered evenly around the round magnet holding it in. If the ring is contacting the magnet, you will not get a stable current when you try to start a plasma. In this case, turn everything off, vent the system, and center the ring.

 

Procedure for carbon coating

  1. Remove "jumper plug" from hummer and attach "CEA's connector"
  2. Place "CEA's head assembly" and quartz jar on the hummer pedestal.
  3. Move the argon gas line from the sputter coating target head to the CEA's gas imput.
  4. Turn on hummer power switch.
  5. As the system is pumping down, flush the system with argon. Do this by turning the needle valve counter-clockwise until you see the pressure rise. This indicates that the valve is open. Then close the valve and let the system pump down again. Do this two to three times.
  6. Let vacuum reach less than 60 militorr, may take up to 30 minutes.
  7. Turn on high voltage switch, this activates the CEA's power on relay.
  8. Always start coating from 0 power.
  9. Open the argon gas valve to 100 militorr.
  10. Turn on the CEA's main power switch (right side of machine). Light should be on the front switch.
  11. Warm up the electrode tip:
    1. Turn the current control clockwise until the CEA's current meter reads 5 amps.
    2. After 10 seconds, slowly turn the CEA's current control counter-clockwise until it reads 0 amps.
    3. Wait 20 seconds.
    4. Repeat step 11a. through 11c. 2 or 3 times until electrode tip glows orange.
  12. When the tip glows bright orange, increase the current until tip is almost white.
  13. Reduce the current until the tip is yellow.
  14. DO NOT LOOK DIRECTLY AT THE ELECTRODE TIP WHEN IT IS GLOWING WHITE.
  15. Increase the current while carefully watching the current meter. When you see the current drop (whn current reaches 40 to 60 amperes), immediately decrease current by about 10 amperes. Deposition is now taking place.
  16. When deposition is complete (5-30 seconds):
    1. Rotate the CEA's current control to the off (counter-clockwise) position.
    2. Turn the CEA's main power switch off.
    3. Turn the hummer high voltage control off.
    4. Turn the hummer main power switch off.
  17. Remove the CEA top plate, remove the quartz jar, and remove the specimens.
  18. Replace argon gas line to the sputter coating target head.
  19. Remove the CEA's connector, and replace with the "jumper plug".

Equipment:


Last Revision:

Sep 28, 2020