Kai Sun

Associate Research Scientist


2800 Plymouth Road, NCRC Building 22 G013

T: (734) 936-3353





FEI Quanta 200 3D Focussed Ion Beam Workstation and Environmental Scanning Electron Microscope

Location: Room G029, Building 22 of The North Campus Research Complex

Environmental Scanning Electron Microscopy: Although an Environmental Scanning Electron Microscope produces a scanned image similar to that of a regular scanning electron microscope, the environment of the sample chamber and the method of detecting the secondary electron signal are novel. The sample chamber is held at a pressure of typically between 1-20 torr.

  • Imaging - Gaseous Environmental Secondary Detector (GSED)
  • Imaging - Everhart-Thornley Detector (SED)
  • Imaging - Environmental BackScatter Detector
  • X-ray - Noran UTW XEDS Detector with 4Pi analysis system (to be installed)
  • 3.5nm @ 30kV at high vacuum
  • 3.5nm @30kV in ESEM mode
  • 15nm @ 3kV in low vacuum mode