Hummer Sputter Coater
| Location | Dow 2224 |
| Contact |
Contact: Tim Chambers, Sahar Farjami |
| Quantity |
1
|
Specifications
Sputter source material: Gold/palladium
Process gas: Argon
Chamber vacuum: 70-140 mTorr
Voltage control: Adjust position for current of 15 mA
Plasma current: 15 mA
Plating time: 2 min